MICROELECTRONICS AND SEMICONDUCTORS

INTRODUCTION

UV Disinfection of Microelectronics and Semiconductors

In the microelectronics and semiconductors industry, even the smallest of contaminants in the production process water: organic or inorganic can seriously jeopardize the quality of the end-product. As both industries work with products that deliver electrical conductivity – high quality, ultra-pure water is required to avoid any negative impact on the internal components.

UV technology is a favored solution for this, as it does not alter any water properties while eliminating threatening microorganisms. ULTRAAQUA UV systems are extremely versatile and besides standard disinfection, the ULTRAAQUA UV systems portfolio also includes Total Organic Carbon (TOC) reduction, Advanced Oxidation Process (AOP), de-chlorination, and ozone destruction.

The combination of specially developed gas fillings, amalgam types, and extremely high purity quartz material provides a high-intensity output of UV-rays capable of both direct photolysis and a generation of free hydroxyl radicals from molecules containing oxygen atoms. The efficiency of these solutions has been proven to be unsurpassed by any other alternatives in the UV industry.